Materials
Materials
Materials processed by AMTE are primarily focused on semiconductor applications. Below is a brief overview:
Ceramics
1. Alumina Ceramic (Al₂O₃): Purity > 95%, utilizing Japanese Mitsubishi ceramic powder as the primary material.
2. Zirconia Ceramic (ZrO₂): Features a smooth surface suitable for lifter pin applications.
3. Aluminum Nitride (AlN): A highly insulating ceramic material featuring excellent thermal conductivity,sourced from the U.S. and South Korea.
Quartz
GE Quartz is the primary material used; AMTE can also comply if customers specify other quartz materials.
Engineering Plastics
There are numerous types of engineering plastics. AMTE focuses on the following key materials for semiconductor applications:
1. Vespel or PI (POLYIMIDE): Primarily applied in high-temperature and plasma environments, such as etching and thin film deposition equipment.
2. PEEK: Possesses excellent hardness and processing stability, temperature resistance up to 180°C, and resistance to weak acids and weak bases, making it widely used in semiconductor equipment.
Metals
Aluminum Alloy 6061
Widely applied in semiconductor equipment, possessing sufficient hardness and extremely low contamination risks.
Evaluating Semiconductor Equipment Components, Discontinued Parts, or Equipment Issues
Simply provide your technical drawings, samples, equipment model, operating environment, and current issues.AMTE can assist in evaluating optimal repair, processing, alternative development, or follow-up solutions based on your component conditions and equipment requirements.